EN
Single regulation chiller
Temperature Stability: ±0.1℃
Temperature Range: +5℃ to +40℃
Cooling Capacity: 2kW@20℃ / 3.5kW@20℃ /9KW@20℃
Engineered for semiconductor photoresist processing and etching equipment, with extended compatibility for printing, laser, medical, and lab testing applications. Compact compressor-based chiller for precision thermal management.
- Overview
- Recommended Products
Technical Description:
A closed-loop circulation system for precision
temperature control in semiconductor reaction
chambers.Combines heat exchangers, circulation
pumps, compressors,and an intelligent control
system with predictive & adaptive control
technologies layered over PID algorithms for
unmatched process stability.
Key Advantages :
PCW-Free Compact Design: 30% smaller footprint, eliminates process cooling water dependency
Dynamic Response: 40% faster temperature stabilization with energy-optimized control
Custom Interfaces: Configurable communication (RS485/Modbus) and fluid ports
Industrial Robustness: Full-metal enclosure, 25% lower energy consumption
EMI-Immune Control: PLC with IEC 61000-compliant interference resistance
️ Air-Cooled Simplicity: Plug-and-play setup in ≤5 minutes
Core Components & Operation:
Component |
Technology |
Compressor |
Hermetic inverter compressor with liquid slugging protection (±0.5℃ control) |
Condenser |
Stainless steel, <5% thermal loss |
Evaporator |
Titanium plate-type, 35% higher efficiency, ≤55dB noise |
Heater |
Submerged direct-heating, ±0.3℃ uniformity |
Expansion Valve |
Electronic valve with ±1℃ superheat control |
Pump |
Mag-drive pump (fluorinated fluid version), <2% flow fluctuation |
Refrigeration Principle：
1. Compression → Refrigerant pressurization
2. Condensation → Heat dissipation & liquefaction
3. EEV throttling → Low-pressure mist generation
4. Evaporation → Precision heat absorption from equipment
5. Inverter flow control → Maintains ±0.1℃ stability
| LRS Product Parameters | |||||
| Product | Chiller | ||||
| Model | LRS-018 | LRS-030 | LRS-090 | ||
| Refrigeration capacity(W)@20℃ | 3KW@20℃ | 3.5KW@20℃ | 9KW@20℃ | ||
| Power | 1150W | 4300W | 6900W | ||
| Power Supply | 1Ph,220V,50 Hz | 3Ph,220 V,50 Hz | |||
| Internet Traffic | 15LPM | 20LPM | 40LPM | ||
| Precision | ±0.1℃ | ||||
| Refrigerant | R410A | R410A | R410A | ||
| Protective function | Motor overload, overtemperature, leakage, overpressure, low pressure, lack of fluid, leakage, exhaust overheating and other protections | ||||
| Temperature Range of Circulating Fluid | +5℃~+40℃ | +5℃~+80℃ | +5℃~+40℃ | ||
| Temperature range | 5~35℃ | ||||
| Storage Tank Capacity | 5L | 10L | 15L | ||
| External Loop Size Interface | RC1/2” | RC1/2” | RC1” | ||
| size(mm) | 380W X 500D X 655H | 400W X 675D X 800H | 400W X 1000D X 1200H | ||
| net Weight | 60kg | 70kg | 80kg | ||
