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Triple Channel Chiller
Temperature Stability: ±0.1℃
Temperature Range: -40˚C～+80˚C
Cooling Capacity: -40℃@6 KW/20℃@25 KW
Industrial-grade compressor chiller featuring premium-brand compressors for exceptional stability. Delivers ±0.1℃ outlet temperature stability for critical applications including:
Photolithography/etching equipment cooling
PVD/CVD tool thermal management
Chemical & pharmaceutical reactor temperature control
GMP-compliant pharmaceutical process cooling
- Overview
- Recommended Products
Technical Description:
Lingheng Triple-Circuit Chillers deliver multi-load precision cooling (±0.1℃) in a single unit. Featuring configurable outputs for stable environments, they provide:
✅ Smart Control: Scheduled operation, auto-compensation, self-diagnostics
✅ Triple Safety: Overheat/overload/water shortage alarms
✅ Industrial Connectivity: I/O, RS232/RS485, Ethernet/IP
Engineered for semiconductor cluster tools and PV production lines with 30% energy savings.
Key Advantages:
TripleSync™ Integration
» 3 independent circuits in single chassis
→ 55% cleanroom footprint reduction
Cluster-Grade Precision
» ±0.1℃ stability with <±0.03℃ inter-circuit gradient
→ Enables multi-chamber process synchronization
Dynamic Load Balancing
» Smart cooling allocation (30kW total capacity)
→ 28% energy savings on variable loads
Multi-Tool Compatibility
» Plug-and-play with ASML/AMAT/TEL cluster tools
→ Supports 300mm fabs & PV TOPCon lines
Ultraclean Titanium Ecosystem
» Customizable flow paths with modular sealing
→ <0.1ppb fluid residue (Class 10 compliant)
Core Components & Operation:
Component |
Technology |
Compressor |
Hermetic inverter compressor with liquid slugging protection (±0.1℃ control) |
Condenser |
Stainless steel, <5% thermal loss |
Evaporator |
Plate-type design, 35% higher efficiency, ≤55dB noise |
Heater |
Submerged direct-heating, ±0.3℃ uniformity |
Expansion Valve |
Electronic valve with ±1℃ superheat control |
Pump |
Mag-drive pump (fluorinated fluid version), <2% flow fluctuation |
Refrigeration Principle:
Adaptive PID Refrigeration Cycle:
1️⃣ Compression → Refrigerant pressurization
2️⃣ Condensation → Heat dissipation & liquefaction
3️⃣ EEV throttling → Low-pressure generation
4️⃣ Evaporation → Precision heat absorption from equipment
5️⃣ Inverter flow control → Maintains ±0.1℃ stability
| VT410 Product Parameters | |
| Product Name | Chiller |
| Product Model | VT410-W-33 |
| Cooling Method | Water-cooling |
| Control Mode | PID control |
| Temperature Control Range | CH1:-45~+60℃ |
| CH2:+30~+90℃ | |
| CH3:+10~+55℃ | |
| Precision | ±0.1℃ |
| Cooling capacity | CH1:6KW@-40˚C |
| CH2:30KW@+30℃ | |
| CH3:28KW@+20℃ | |
| Power | CH1:4KW |
| CH2:14KW | |
| CH3:4KW | |
| Tank | CH1 / CH2 shared expansion tank 30L + hot water tank 25L |
| Circulating fluid flow | CH1:17 L/min @ 0.9MPa |
| CH2:17 L/min @ 0.9MPa | |
| CH3:25 L/min @ 0.76MPa | |
| PCW traffic | CH1: 50 L/min@15~25℃@0.3MPa |
| CH2: 20 L/min@15~25℃@0.3MPa | |
| CH3: 50 L/min@15~25℃@0.3MPa | |
| Temperature range | 5~35 ℃ |
| Circulating fluid type | FC3283 |
| Circulating liquid interface | CH1/CH2/CH3: Rc 3/4" |
| PCW interface | CH1/CH2/CH3: Rc1" |
|
External dimensions （mm） |
600W*1370D*2000H |
| Input power supply | 3Ph,380-400V,50Hz |
| Whole Machine Power | 41.1 KW |
| Net Weight | 600 kg |
| Design Standards | SEMI |
