EN
UPW Heater
Temperature Stability: ±0.1℃
Temperature Range: -20˚C～+80˚C
Heating Power：48KW-192KW
Ultrapure Water (UPW) Heating Module, Engineered for precision thermal control in critical semiconductor manufacturing processes, this advanced heating system utilizes high-purity quartz-encapsulated halogen lamps for non-contact heating, ensuring zero metallic contamination.
- Overview
- Recommended Products
Scope of Application
Semiconductor Manufacturing: Cleaning of silicon wafers or compound materials
Lithium Battery & Solar PV Industries: Production line cleaning systems
Display Panel Industry: Cleaning of LCD glass substrates
Eco-Friendly Alternative: Replaces Freon-based cleaning with ultrapure water solutions
Key Features
Premium Material Construction
High-purity quartz heating elements
Fluororesin piping systems
Non-contact halogen lamp heating technology
Space-Optimized Design
Ultra-slim profile minimizes footprint
Intelligent Temperature Control
High-power halogen lamps enable rapid heating
Automatic temperature adjustment based on real-time flow variations
Performance & Safety
≥95.8% heating efficiency
Comprehensive safeguards with alarms for:
Flow abnormalities
Over-temperature conditions
Dry-firing protection
Leak detection
Sensor failure
Heater circuit faults
| Model | SWH-48 | SWH-72L | SWH-96L | SWH-144L | SWH-192L | |
| Heating method | Adopting infrared radiation heating method | |||||
| Performance | Power | 48kW | 72kW | 96kW | 144kW | 192kW |
| Standard flow rate(△T55℃) | 12LPM | 18LPM | 24LPM | 36LPM | 48LPM | |
| Minimum heating flow rate | 4-6LPM | 8-12LPM | ||||
| Set temperature range | 20-100℃ | |||||
| Temperature control accuracy | ±1℃(Depending on the conditions) | |||||
| Flow display range | 0-60LPM | |||||
| Composition | Heater | Halogen lamp tube, indirect heating method without contact with liquid | ||||
| Heater material | High purity transparent quartz | |||||
| Contact with liquid parts and pipeline materials | High purity transparent quartz and high-purity PFA tube | |||||
| Security response function | Abnormal flow, high temperature, dry burning, leakage, sensor disconnection, halogen filament melting, etc | |||||
| External communication function | RS-232C、RS-485、Modbus TCP/IP | |||||
| External input/output function | 8 input, 14 output signals | |||||
| Other | External dimensions(mm) | 450W*900D *1625H | 450W*1000D *1725H | 700W*1000D *1725H | 700W*1000D *1850H | 800W*1000D *2000H |
| Power supply | AC 380V 50/60Hz three-phase five wire | |||||
