EN
Ultra-low temperature chiller
Temperature Stability: ±0.1℃
4Temperature Range: -70˚C～+80˚C
Cooling Capacity: 12KW@-60˚C 8KW@-70˚C
Industrial-grade compressor chiller featuring premium-brand compressors for exceptional stability. Delivers ±0.1℃ outlet temperature stability for critical applications including:
Photolithography/etching equipment cooling
PVD/CVD tool thermal management
Chemical & pharmaceutical reactor temperature control
GMP-compliant pharmaceutical process cooling
- Overview
- Recommended Products
Technical Description
Lingheng Cryogenic Chillers redefine industrial cooling limits with -70℃ deep-freeze capability,
powered by cascade refrigeration and natural refrigerant technology (GWP=1).
Delivering ±0.1℃ stability and 25% reduced cooling loss,Featuring SECS/GEM protocol support
and custom I/O configurations, they meet Class 100 cleanroom standards while simultaneously
addressing process challenges and carbon tax compliance.
Key Advantages
-70℃ Cryogenic Operation
→ Engineered for advanced semiconductor/biotech processes
Advanced Sealing Technology
→ Reduces cooling loss by >25% (vs. conventional models)
Custom Interface Integration
→ Configurable communication ports & fluid connections
Core Components & Operation
Component |
Technology |
Compressor |
Hermetic inverter compressor with liquid slugging protection (±0.1℃ control) |
Condenser |
Stainless steel, <5% thermal loss |
Evaporator |
Plate-type design, 35% higher efficiency, ≤55dB noise |
Heater |
Submerged direct-heating, ±0.3℃ uniformity |
Expansion Valve |
Electronic valve with ±1℃ superheat control |
Pump |
Mag-drive pump (fluorinated fluid version), <2% flow fluctuation |
Refrigeration Principle
Adaptive PID Refrigeration Cycle:
1️⃣ Compression → Refrigerant pressurization
2️⃣ Condensation → Heat dissipation & liquefaction
3️⃣ EEV throttling → Low-pressure generation
4️⃣ Evaporation → Precision heat absorption from equipment
5️⃣ Inverter flow control → Maintains ±0.1℃ stability
| US708 Product Parameters | |
| Product | Chiller |
| Product Model | US708-W-33 |
| Cooling Method | Water-cooled cooling type |
| Control Mode | PID Control |
| Temperature Control Range | -70℃~+40℃ |
| Precision | ±0.1℃ |
| Refrigeration Capacity | 12kW@-60˚C |
| 8KW@-70˚C | |
| Power | 6kW |
| Tank | 15+15L Double tank operation + fluid replenishment tank |
| Circulating Liquid | 20 L/min @ 0.7MPa |
| Flow Rate | |
| PCW Traffic | 50～80L/min@15~25℃ |
| Temperature Range | 5~35℃ |
| Types of Circulating Fluid | Ethylene Glycol Mixture， Fluorinated liquid |
| Circulating Liquid Interface | Rc3/4” |
| PCW Interface | Rc2” |
| Size（mm） | 600W*1370D*1820H |
| Input Power Supply | 3Ph,380-400V,50Hz |
| Machine Power | 22kW |
| Net Weight | 650kg |
| Design Standards | SEMI |
