CO2 Chillers
Temperature Stability: ±0.1℃
Temperature Range: -20˚C～+80˚C
Cooling Capacity: -20℃@2 KW/20℃@10 KW
Delivering precision thermal control through compact compressor chillers for:
Semiconductor wafer fabrication & testing
New energy battery/e-drive validation
Precision equipment coolin
Test-specific air-cooling applications
- Overview
- Recommended Products
- 15+ Years of Industrial Thermal Management Experience
- Strict Factory Quality Inspection
- Worldwide Technical Support
01 Why Choose LIAT CO₂ Chiller
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Eco-Friendly Natural CO₂ refrigerant Low GWP zero ODP |
High Precision ±0.1℃ temperature stability for reliable performance |
Safe & Reliable High-pressure design with multiple safety protections |
Compact Design Small footprint, easy installation & space saving | Customizable Wide range of models & OEM/ODM solutions |
Global Support
24/7 technical support and fast service response |
02 Powerful performance
Performance Highlights |
Performance Highlights |
Performance Curves | Key Advantages |
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• Eco-friendly Refrigeration • Ultra-high Temperature Precision • High Energy Efficiency • Class 100 Cleanroom Compatibility • Stable Continuous Operation • Intelligent Remote Monitoring • Compact Industrial Design • Easy Maintenanc |
• Eco-friendly Refrigeration |
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Structure Design |
Dimensions (Unit: mm) |
Core Components |
Refrigeration System |
Working Principle |
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• Compact Industrial Cabinet |
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The transcritical CO₂ refrigeration cycle uses natural refrigerant R744 to deliver high cooling efficiency while minimizing greenhouse gas emissions and ensuring long-term regulatory compliance.
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① The compressor compresses CO₂ refrigerant. |
03 Performance Description
The advanced transcritical CO₂ refrigeration system delivers highly efficient cooling while significantly reducing environmental impact.
Combined with intelligent PID control, the system maintains outstanding temperature stability, enabling consistent performance in semiconductor production, laboratory research, and other precision manufacturing environments.
04 Applications
 Semiconductor Wafer Manufacturing |
 Photolithography Systems |
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Etching Equipment
Atomic Layer Deposition (ALD)
Battery Testing
Precision Electronics
Laboratory Equipment
05 Technical Details
Structure Design |
Core Components |
Refrigeration System |
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• Compact Industrial Cabinet • Cleanroom-compatible Construction • Modular Design • Easy Maintenance • Optimized Airflow Management |
• Hermetic Inverter Compressor • Stainless Steel Condenser • Titanium Plate Heat Exchanger • Electronic Expansion Valve • Magnetic Drive Pump • PLC Intelligent Controller |
The transcritical CO₂ refrigeration cycle uses natural refrigerant R744 to deliver high cooling efficiency while minimizing greenhouse gas emissions and ensuring long-term regulatory compliance. |
06 Working Principle
① The compressor compresses CO₂ refrigerant.
② Heat is rejected through the gas cooler.
③ The expansion valve precisely regulates refrigerant flow.
④ The evaporator absorbs process heat.
⑤ Intelligent PID control continuously maintains stable process temperatures.
07 Specifications
| Model | GVS010-W-32F | GVD010-W-32F | |||
| Channels | 1 | 2 | |||
| Temperature Range | -20℃ to +90℃ | -20℃ to +90℃ | -20℃ to +90℃ | ||
| Fluid | Fluorinated fluid | ||||
| Tank Volume | 20 L | 20 L | 20 L | ||
| Temperature Stability (Idle) | ± 0.1 ℃ | ||||
| Temperature Control | PID control | ||||
| Compressor | Type | Inverter compressor | |||
| Power | 3 kW | 3 kW | 3 kW | ||
| Refrigerant | CO₂ (R744) | ||||
| Heat Exchanger |
Cooling Capacity |
4 kW @ -10°C / 10 kW @ +20°C | 4 kW @ -10°C | 10 kW @ +20°C (per channel) | |
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PCW Requirement |
15 LPM @15 ～25 ℃@0.3～0.4Mpa | 15 LPM @15 ～25 ℃@0.3～0.4Mpa(per channel) | |||
| Type | Plate heat exchanger | Plate heat exchanger | |||
| Heater Power | 3kW | 3 kW | 3 kW | ||
| Pump | Type | Magnetic drive pump (inverter) | Magnetic drive pump (inverter) | ||
| Power | 1.5 kW | 1.5 kW | 1.5 kW | ||
| Capacity | 20 LPM @0.7MPa | 20 LPM @0.7MPa(per channel) | |||
| Certification | SEMI S2, S8、CE | SEMI S2, S8、CE | |||
| Communication | RS485/EtherCAT | ||||
| Rated Power | 7.7kW | 15.4kW | |||
| Rated Current | 20.2A | 40.4 A | |||
| Operating Current | 11.7 A*Measured at fluid temperature +20°C, heater output ~ 15% | 23.6 A *Measured at fluid temperature +20°C, heater output ~ 15% | |||
| Breaker | 32A | 63A | |||
| Dimensions | 380W*900D*1250H （ mm） | 600W*900D*1300H （ mm） | |||
| Power Supply | 3Ph, 208-220V, 50/60Hz | ||||
08 Why Choose LIAT
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09 Frequently Asked Questions
What is a CO₂ Chiller?
A CO₂ Chiller is a refrigeration system using natural refrigerant R744 (CO₂) to provide environmentally friendly, energy-efficient, and high-precision industrial cooling.
Why choose CO₂ refrigerant?
CO₂ has a GWP of only 1, Zero ODP, excellent heat transfer performance, and complies with increasingly strict global environmental regulations.
What industries use CO₂ Chillers?
Semiconductor manufacturing, battery testing, laboratories, medical equipment, precision electronics, optical manufacturing, and scientific research.
Can LIAT customize the system?
Yes. Cooling capacity, operating temperature, controller, communication protocol, refrigerant circuit, and mechanical structure can all be customized.
Is the system suitable for cleanroom applications?
Yes. The fully sealed refrigeration design supports contamination-sensitive environments such as semiconductor cleanrooms.
How can I request a quotation?
Provide your required cooling capacity, operating temperature, application details, and installation conditions. Our engineers will recommend the most suitable solution within 24 hours.
