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CO2 Chillers
Temperature Stability: ±0.1℃
Temperature Range: -20˚C～+80˚C
Cooling Capacity: -20℃@2 KW/20℃@10 KW
Delivering precision thermal control through compact compressor chillers for:
Semiconductor wafer fabrication & testing
New energy battery/e-drive validation
Precision equipment coolin
Test-specific air-cooling applications
- Overview
- Recommended Products
Technical Description:
Lingheng CO₂ Ultra-Clean Chiller
Utilizing natural refrigerant (GWP=1, ODP=0) to deliver ±0.1℃ precision thermal control for advanced semiconductor processes. Enables -40℃ to +100℃ wide-range operation via transcritical cycle technology, compatible with mission-critical applications:
Photolithography
Etching
Atomic Layer Deposition (ALD)
Full-sealed flow path meets Class 100 cleanroom standards, while F-gas free design mitigates carbon tax exposure — achieving both process excellence and ESG compliance.
Key Advantages：
Environmental Sustainability:
GWP=1 - Fully aligned with global climate targets, mitigating carbon tax exposure
Natural refrigerant - Eliminates fluorinated gas recovery/disposal requirements
Zero ODP - Compliant with international regulations (e.g., Kigali Amendment)
±0.1℃ precision control - Enables advanced nodes (TSMC 5nm fluorinated refrigerant phase-out compliant)
Contamination-free operation - CO₂ residue <1ppb, certified for Class 1000 cleanrooms
30% higher COP - Transcritical cycle inverter tech (verified vs. LIAT 1.0 baseline)
Safety Performance:
Non-toxic & non-flammable - Eliminates fluorinated refrigerant leakage risks
Fab risk reduction - 68% lower environmental hazard index (per SEMI S10)
Core Components & Operation:
Component |
Technology |
Compressor |
Hermetic inverter compressor with liquid slugging protection (±0.5℃ control) |
Condenser |
Stainless steel, <5% thermal loss |
Evaporator |
Titanium plate-type, 35% higher efficiency, ≤55dB noise |
Heater |
Submerged direct-heating, ±0.3℃ uniformity |
Expansion Valve |
Electronic valve with ±1℃ superheat control |
Pump |
Mag-drive pump (fluorinated fluid version), <2% flow fluctuation |
Refrigeration Principle:
1. Compression → Refrigerant pressurization
2. Condensation → Heat dissipation & liquefaction
3. EEV throttling → Low-pressure mist generation
4. Evaporation → Precision heat absorption from equipment
5. Inverter flow control → Maintains ±0.1℃ stability
| GVS010 Product Parameters | GVS405 Product Parameters | ||
| Product Model | GVS010-W-32F | GVS405-W-32F | GVD010-W-32F |
| Cooling Method |
Water-Cooled Cooling Type |
||
| Control Mode |
Pid Control |
||
| Temperature Control Range | -20℃~+90℃ | -40℃~+90℃ | -20℃ to +90℃ |
| Precision |
±0.1℃ |
||
| Refrigeration Capacity |
-20℃@2 KW -10℃@4 KW 0℃@6 KW 20℃@10 KW 80℃@10 KW |
-40℃@4KW |
4kW@-10℃ 10 kW @+20℃ |
| Power | 3kW | 3kw | |
| Tank | 20L | 20L | |
| Circulating Liquid Flow Rate | 20L/min（0.75Mpa） | 20L/min（0.5Mpa） | 20L/min（0.7Mpa） |
| PCW Traffic | 15L/min@15~25℃ | 15 LPM @15 ～25 ℃@0.3～0.4Mpa | |
| Temperature Range | 5~35℃ | ||
| Types of Circulating Fluid | Ethylene Glycol Mixture, Pure Water,Fluorinated Solution | ||
| Refrigerant | R744（CO2) | ||
| Circulating Liquid Interface |
Rc3/4” |
||
| PCW Interface | Rc1/2” | Rc1-1/4” | Rc1/2” |
| External Dimensions（mm） | 380W*900D*1250H | 500W*1160D*1650H |
600W*900D*1300H（mm） |
| Input Power Supply | 3Ph,208-220V,50Hz | 3Ph,208-220V,50/60Hz | |
| Machine Power | 8kW | 15.4kW | |
| net Weight | 200kg | ||
| Design Standards | SEMI | SEMI | SEMI S2、 F47 |
