Dual Channel Chiller

Technical Description:

Lingheng Dual-Circuit Chillers deliver dual independent temperature control in a single unit.
Featuring ±0.1℃ stability per circuit, these systems are engineered for:

Synchronized cooling of PVD/CVD chambers

Multi-zone thermal management in etching tools
With 40% smaller footprint and industry-proven compatibility (AMAT/LAM/TEL), they redefine space-efficient precision cooling.

Key Advantages:

Two-in-One Efficiency
» Replaces dual chillers with independent circuits
→ 40% cleaneroom space saved + 30% CAPEX reduction

Precision Dual Control
» ±0.1℃ stability per circuit (ΔT<0.2℃)
→ Ensures <3% film thickness variation in CVD/PVD

Fab-Ready Integration
» Pre-loaded AMAT/LAM/TEL protocols
→ 90% 300mm tool compatibility, 65% less downtime

Energy TwinDrive™
» 35% lower energy vs. conventional pairs
→ SEMI S23 certified, >$18k annual savings

Zero Cross-Contamination
» Customizable flow paths  + laser-welded joints
→ Compatible with UPW/fluorinert/EGW

Core Components & Operation:

Component	Technology
Compressor	Hermetic inverter compressor with liquid slugging protection (±0.1℃ control)
Condenser	Stainless steel, <5% thermal loss
Evaporator	Plate-type design, 35% higher efficiency, ≤55dB noise
Heater	Submerged direct-heating, ±0.3℃ uniformity
Expansion Valve	Electronic valve with ±1℃ superheat control
Pump	Mag-drive pump (fluorinated fluid version), <2% flow fluctuation

Refrigeration Principle:

Adaptive PID Refrigeration Cycle:
1️⃣ Compression → Refrigerant pressurization
2️⃣ Condensation → Heat dissipation & liquefaction
3️⃣ EEV throttling → Low-pressure generation
4️⃣ Evaporation → Precision heat absorption from equipment
5️⃣ Inverter flow control → Maintains ±0.1℃ stability