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Single Channel Chillers
Temperature Stability: ±0.1℃
Temperature Range: -40˚C～+80˚C
Cooling Capacity: -40℃@6 KW/20℃@25 KW
Featuring inverter-based temperature control, this system enhances energy efficiency while reducing power consumption. Delivers ±0.1℃ stability for precision-critical applications including:
Semiconductor etching tools & CMP (Chemical Mechanical Polishing)
Laboratory instruments & high-precision test equipment
Aesthetic medical devices & solid-state lasers
Mold temperature control systems
- Overview
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Technical Description:
Lingheng Single Channel Chillers deliver targeted thermal management with integrated compact design.
Engineered for precision cooling of standalone equipment, our units feature ±0.1℃ PID control and
inverter compressor technology for critical applications including:
Semiconductor metrology tools
Laser processing systems
Medical analyzers
Test bench setups
Isolated fluid circuit prevents cross-contamination, while PCW-free construction reduces installation costs by 30%.
Key Advantages:
Cryogenic Excellence: Operates at -40℃ with <3min temperature transition
Zero-Loss Circulation: Laser-welded piping with <0.1% annual fluid loss
Inverter Efficiency: 35% energy savings vs. fixed-speed models (SEMI S23 certified)
Dynamic Ramp Performance: Achieves ±5℃/min temperature change rates
Multi-Protocol Integration: SECS/GEM & OPC-UA ready for ASML/TEL/LAM tool integration
Core Components & Operation
Component |
Technology |
Compressor |
Hermetic inverter compressor with liquid slugging protection (±0.1℃ control) |
Condenser |
Stainless steel, <5% thermal loss |
Evaporator |
Plate-type design, 35% higher efficiency, ≤55dB noise |
Heater |
Submerged direct-heating, ±0.3℃ uniformity |
Expansion Valve |
Electronic valve with ±1℃ superheat control |
Pump |
Mag-drive pump (fluorinated fluid version), <2% flow fluctuation |
Refrigeration Principle
Adaptive PID Refrigeration Cycle:
1️⃣ Compression → Refrigerant pressurization
2️⃣ Condensation → Heat dissipation & liquefaction
3️⃣ EEV throttling → Low-pressure generation
4️⃣ Evaporation → Precision heat absorption from equipment
5️⃣ Inverter flow control → Maintains ±0.1℃ stability
| VS100/407/020 Product Parameters | |||
| Product Model | VS100-W-32 | VS020-W-32 | VS407-W-33 |
| Cooling Method | Water-Cooling | ||
| Control Mode | PID Control | ||
| Temperature Control Range | -20℃~+80℃ | -40℃~+80℃ | |
| Precision | ±0.1℃ | ||
| Refrigeration Capacity |
-20℃@2 KW -10℃@4 KW 0℃@6 KW 20℃@10 KW 80℃@10 KW |
-20℃@5 KW -10℃@10 KW 0℃@15 KW 20℃@25 KW 40℃@25 KW |
-40℃@6 KW -20℃@12 KW 0℃@25 KW 20℃@25 KW 40℃ @25 KW |
| Power | 3kW | ||
| Tank | 20L | 25L | |
| Circulating Liquid Flow Rate | 20L/min（0.75Mpa） | 20L/min(0.7Mpa) | |
| PCW Traffic | 15L/min@15~25℃ | 30L/min@15~25℃ | 50 L/min@15~25℃ |
| Temperature Range | 5~35℃ | ||
| Types of Circulating Fluid | Ethylene glycol mixture, pure water, fluorinated liquid | Clear water, Ethylene glycol mixture, Pure water, Fluorinated solution | Ethylene glycol mixture, fluorinated liquid |
| Refrigerant | R410A | / | / |
| Circulating Liquid Interface | Rc3/4“ | ||
| PCW Interface | Rc1/2” | Rc3/4" | Rc1-1/4" |
| External Dimensions（mm） | 380W*900D*1300H | 420W*900D*1250H | 500W*1150D*1500H |
| Input Power Supply | 3Ph,208-220V,50Hz | 3Ph,208-220V,50Hz | 3Ph,380-400V,50Hz |
| Machine Power | 8KW | 9.7kW | 14kW |
| net Weight | 200kg | 210kg | 360kg |
| Design Standards | SEMI | ||
