GWP=1 – Fully compatible with carbon neutrality goals, mitigating future carbon tax risks Zero ODP – Compliant with global environmental regulations (e.g., Kigali Amendment) Precision temperature control: ±0.1°C accuracy for advanced processes (TSMC5N fluorinated refrigerant phase-out compliant)
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All-metal panel; compact footprint; low energy consumption PLC control ensures strong stability and excellent EMI resistance Supports customizable communication interfaces and liquid circulation ports
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Space-optimized dual-path integration Performance-tuned for advanced etching processes Energy-conserving inverter technology
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Space-optimized dual-circuit integration 8kW heat transfer capacity with compressor-free operation Compatibility-engineered for universal OEM equipment integration
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CO2 Chillers
Single regulation chiller
Dual Channel Chiller
Dual Channel Heat Exchangers
Semiconductor Manufacturing Precision Cooling SolutionsHow Advanced Chillers Boost Yield, Reduce Costs & Power Next-Gen Chips “At 5nm nodes, 40% yield loss links to thermal instability — our chiller systems reduce this by 37%.”...
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Automotive Equipment Cooling SolutionsPrecision Thermal Systems for EV Production & Testing #1 Production Line Cooling: Eliminating Downtime Loss Industry Pain Point Die-casting mold ΔT >8°C causing porosity defects (15% rejection...
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Years of
Experience
Lingheng Thermal Control Technology (Suzhou) Co., Ltd.
Headquartered in Shanghai with our global marketing center, we operate a dedicated R&D and Manufacturing Center in Wujiang, Suzhou. Our nationwide service network spans seven strategic locations: Beijing, Shanghai, Hefei, Chengdu, Wuhan, Shenzhen, and Xiamen.
Core Product Portfolio:
Precision Temperature Control Equipment (-100°C to +200°C range):
• Industrial Chillers
• Thermal Exchangers
• Heater Jackets
• Ultra-pure water Heater
• Fluorinated liquid
As an integrated developer, manufacturer, and supplier of thermal management systems, we serve mission-critical applications in:
✅ Semiconductor Fabrication
✅ New Energy Component Testing
✅ Data Center Infrastructure
Production base
Research and technical personnel
Team members
Factory area
R&D engineers conduct iterative testing on key parameters of new chiller prototypes.
Batch testing of product control accuracy and cooling rate in clean rooms
Cleanroom Commissioning of Newly Delivered Chillers
R&D Engineers Optimizing Products in Class 100 Cleanroom
Mature and excellent employees are busy in the workshop
Testing of Heating Jackets Wrapping Complex Shaped Pipes
Established long-term and reliable cooperative relationships with multiple manufacturers
Leading semiconductor fabs and automotive equipment manufacturers requiring precision thermal management solutions.
See why pipe heating system uniformity supports steadier precursor delivery and more controlled thin-film deposition.
2026-10-23
Learn how a semiconductor chiller uses capacity, flow, sensing, and controls to sustain sub-degree process temperature stability.
2026-10-23Submit your needs now—get a tailored solution in 24 hours! Expert advice, transparent pricing, and project-specific specs await. Your inquiry is 100% confidential.
