In processes such as the manufacturing of 5 nm chips and 2.5D/3D packaging, ultra-low temperature control is paramount for product quality and yield. Ultra-low temperature chillers for semiconductors are fundamental pieces of equipment that provide and maintain required thermal steadiness and control, which in turn affect the continuity and efficiency of the production. With more than 12 years of experience, LIAT is an expert in the manufacturing of ultra-low temperature chillers for semiconductors and other thermal control technologies. With clients in the United States, Russia, Australia, and other countries, LIAT’s semiconductor ultra-low temperature chillers combine technology and quality control to provide reliability and maintain performance. This article focuses on the factors that help LIAT’s chillers deliver such performance.
Fabricating semiconductors is a lengthy, continuous operation. Ultra low temperature chillers for semiconductors must remain stable, or they can induce thermal instabilities. Porosity defects can occur, and, at 5nm nodes, even a single temperature ± 1°C shift can result in a 40% loss in yield. In addition to high semiconductor manufacturing defect loss levels, production downtimes are also significantly expensive. Due to the high importance of stability, LIAT embeds stability in the design of every single semiconductor ultra low temp chillers to meet the high standards of the semiconductor industry.
Exceptional system stability of LIAT’s semiconductor ultra low temp chillers is achieved using the control technology of industry sophistication. To satisfy semiconductor industry chillers temperature control with precision of ± 0.1°C is provided over the entire temperature range of -100°C to -+200°C. PLC control system enhances chillers operational stability while also providing excellent EMI of the system target environment. Energy-saving inverter technology guarantees that the system will operate at the desired cooling capacity while maintaining steady-state operation, even with varying load. Stability of operation of ultra low temp chillers will be integrated into systems with increased manufacturing complexity.
Reliability of chilled units using semiconductor machinery comes from the combination of high-quality parts and exceptional manufacturing standards. LIAT's semiconductor ultra low temp chiller, for instance, is made of all-metal panels, ensuring it does not warp and increasing its overall stability. Major components such as compressors and heat exchangers come from trustworthy vendors; the company ensures these parts are carefully examined before integration into the units. Manufacturing occurs in a contamination-free facility and a Class 100 cleanroom to eliminate impurities that could cause performance issues. LIAT does not compromise on quality. Each ultra low temp chiller undergoes batch testing, measuring performance and temperature variations and ensuring stability.
There are over 40 tech members in LIAT's R&D team holding the semiconductor ultra low temp chillers together. New prototypes of chillers undergo iterated testing to explore the full scope of their efficiency in temperature control along with their operational stability over longer periods of time. These tests are meant to support the design optimizations to ensure the chillers function as needed in extreme environments. These tests will also ensure components will function properly with 2.5D and 3D integrations as well as with other semiconductor OEM equipment. All this testing creates the groundwork for dependability in LIAT's semiconductor ultra low temp chillers.
One of the reasons the ultra-low-temperature chillers have such good stability is the ability to meet the requirements of the processes. LIAT provides custom solutions such as variable communication ports and circulators to suit specific needs in semiconductor manufacturing. The dual model provides space-efficient dual-path integration which is designed for advanced etching applications where stable ultra-low temperature control is essential. Be it in the semiconductor fabrication lines or testing of new energy components, the ultra-low temperature chillers can be modified to reduce the risk of operational issues while maintaining reliability.
Stability and service support is also part of the design philosophy. The nationwide service network provides coverage to seven service points in China and offers service and support to meet the requirements of the service network. To international customers, LIAT provides after-sales support and rapid response spare part delivery and/or on-site service and support to solve the issues. LIAT has built stable partnerships with leading semiconductor fabs and optimized the design of the semiconductor ultra-low temperature chillers based on the feedback to create a seamless support system, enabling the ultra-low temperature chillers to work without hiccups throughout their operational life.
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