In the microscopic world of semiconductor fabs, temperature fluctuations as small as 0.1°C can trigger a "butterfly effect," resulting in the scrapping of millions of chips. Why is temperature control so critical?
1、 The "Anchor" of Lithography
Modern lithography machines are like precision optical watches. Their internal lasers, lenses, and worktables generate heat during high-speed operation. The role of a chiller (precision water chiller) is to provide these core components with an ultra-stable temperature environment of ±0.01°C, ensuring that the optical path does not deviate to the micron level, thereby guaranteeing the ultimate precision and overlay accuracy of lithography.
2、 The "Rhythm Master" of Thin Film Deposition
In CVD (chemical vapor deposition) and PVD (physical vapor deposition) processes, reaction temperature directly determines the thickness, uniformity, and composition of the thin film. By precisely controlling the temperature of the reaction chamber, the Chiller ensures that each thin film layer is deposited uniformly, like a piece of music played to a musical score. This is crucial for building the foundation of high-performance chip structures.
3、 Conclusion:
The Chiller has transcended the realm of auxiliary equipment; it is the cornerstone of precision, stability, and yield in semiconductor manufacturing. Unseen yet ubiquitous, it safeguards the perfect transformation from a grain of sand to a chip.
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